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Journal Of Micro/ Nanolithography, MEMS, And MOEMS


The Journal of Micro/ Nanolithography, MEMS, and MOEMS is published by SPIE. The ISSN of this journal is 19325134, 19325150. The journal publishes research in the field related to Atomic and Molecular Physics, and Optics (Q3); Condensed Matter Physics (Q3); Electrical and Electronic Engineering (Q3); Electronic, Optical and Magnetic Materials (Q3); Mechanical Engineering (Q3); Nanoscience and Nanotechnology (Q3).

Journal Of Micro/ Nanolithography, MEMS, And MOEMS Ranking

Overall Rank 15204
Impact Score 1.66
SJR 0.298
Quartile Q3

The Impact Score of an academic journal is a measure reflecting the yearly average number of citations to recent articles published in that journal.

Each subject category of journals is divided into four quartiles: Q1, Q2, Q3 & Q4. Q1 means ranking among the top 25% of journals in the same field.

Other Important Details

Journal Title Journal of Micro/ Nanolithography, MEMS, and MOEMS
Publisher SPIE
ISSN 19325134, 19325150
H-Index 44
Country of Publisher SPIE
Type journal
Journal Scope Atomic and Molecular Physics, and Optics (Q3); Condensed Matter Physics (Q3); Electrical and Electronic Engineering (Q3); Electronic, Optical and Magnetic Materials (Q3); Mechanical Engineering (Q3); Nanoscience and Nanotechnology (Q3)

How to publish in Journal of Micro/ Nanolithography, MEMS, and MOEMS?

Please visit the official website of Journal of Micro/ Nanolithography, MEMS, and MOEMS. Read the instructions for authors and make your submission.